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Reference distance (RF) (mm)
50 mm
Measuring range (mm)
-9~8 mm
Light source wavelength (nm)
655 nm
Laser class
Class II
Spot size (Reference distance) (μm)
75*400 μm
Repeatability (μm)
0.025 μm
Linearity
±0.02%F.S.
Temperature characteristics ( F.S./℃)
0.01%F.S./℃ F.S./℃
Sampling refresh rate (kHz)
1/2/5/10/20/50/88/200/400/590 kHz
Communication port
1 100Base-TX/1000Base-T Ethernet interface, 1 RS232
Analog output
4-channel analog outputs, supports analog voltage and analog current switching
IO input
14 channels, supports timing, zeroing, reset, laser control, recipe switching and other functions
IO output
16 channel, determines status of output
Operating temperature (℃)
0~50 ℃
Storage temperature (℃)
-20~70 ℃
Working humidity
35%-85% no condensation
ESD protection
Contact discharge 4kV, air discharge 8kV, conforms with IEC61000-4-2 standard
EFT protection
Power port 2kV/5 or 100kHz, signal port 1kV/5 or 100kHz, conforms with IEC61000-4-4
Bumps
50Gs/3ms on each axis, conforms with IEC 68-2-27 Ea
Vibrations
10Gs (10-500Hz), conforms with IEC 68-2-6 Fc
IP level
IP67, conforms with IEC 60529 standard
Dimensions (mm)
69*71*47 mm
Weight (including cable) (g)
323 g
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