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行业应用与解决方案
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简体中文

定制平台分类

XYZ 平台用于晶圆测量

*如需详细参数，请联系雅科贝思销售工程师（邮箱：cust-service@akribis-sys.cn）

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产品概述

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产品特性

01
XY十字叠加结构，内置直线电机，步进/扫描

XY十字叠加结构，内置直线电机，步进/扫描
02
Z轴采用高精度音圈电机，用于光学调焦，重复定位精度±0.2μm

Z轴采用高精度音圈电机，用于光学调焦，重复定位精度±0.2μm
03
XY集成高精度光栅尺，重复定位精度±0.5μm

XY集成高精度光栅尺，重复定位精度±0.5μm
04
典型应用领域：6/8寸/12寸晶圆检测

典型应用领域：6/8寸/12寸晶圆检测

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XYZ 平台用于晶圆测量

产品特性

XY十字叠加结构，内置直线电机，步进/扫描

XY十字叠加结构，内置直线电机，步进/扫描

Z轴采用高精度音圈电机，用于光学调焦，重复定位精度±0.2μm

Z轴采用高精度音圈电机，用于光学调焦，重复定位精度±0.2μm

XY集成高精度光栅尺，重复定位精度±0.5μm

XY集成高精度光栅尺，重复定位精度±0.5μm

典型应用领域：6/8寸/12寸晶圆检测

典型应用领域：6/8寸/12寸晶圆检测

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