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行业应用与解决方案
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简体中文

定制平台分类

XYZ 晶圆检测平台

*如需详细参数，请联系雅科贝思销售工程师（邮箱：cust-service@akribis-sys.cn）

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产品概述

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产品特性

01
XY十字叠加结构，内置直线电机，步进/扫描

XY十字叠加结构，内置直线电机，步进/扫描
02
Z轴采用特别设计，用于光学调焦，重复定位精度±1μm

Z轴采用特别设计，用于光学调焦，重复定位精度±1μm
03
XY集成高精度光栅尺，重复定位精度±0.5μm

XY集成高精度光栅尺，重复定位精度±0.5μm
04
底座为采用大理石材料，可以很好的保证下轴高的平面度

底座为采用大理石材料，可以很好的保证下轴高的平面度
05
典型应用领域：8寸/12寸晶圆检测

典型应用领域：8寸/12寸晶圆检测

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SHOW FULL COLUMNS FROM `cn_web_disable_ip` [ RunTime:0.000422s ]
SHOW FULL COLUMNS FROM `cn_web_basic_setting` [ RunTime:0.000636s ]
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SHOW FULL COLUMNS FROM `cn_z_product` [ RunTime:0.000756s ]
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SHOW FULL COLUMNS FROM `cn_cms_column` [ RunTime:0.000602s ]
SHOW FULL COLUMNS FROM `cn_cms_column_customs` [ RunTime:0.000415s ]
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SELECT `cms_column`.`id`,`cms_column`.`type`,`cms_column`.`parentid`,`cms_column`.`modelid`,`cms_column`.`arrparentid`,`cms_column`.`arrchildid`,`cms_column`.`name`,`cms_column`.`catdir`,`cms_column`.`url`,`cms_column`.`items`,`cms_column`.`list_template_html`,`cms_column`.`show_template_html`,`cms_column`.`auditing`,`cms_column`.`seo_title`,`cms_column`.`seo_keywords`,`cms_column`.`seo_description`,`cms_column`.`sitemap`,`cms_column`.`target`,`cms_column`.`isnav`,`cms_column`.`status`,`cms_column`.`isurl`,`cms_column`.`ispush`,`cms_column`.`listorder`,`cms_column`.`createtime`,`cms_column`.`updatetime`,`cms_column`.`is_delete`,`cms_column`.`slide`,`cms_column`.`is_slide`,`customs`.`field` AS `customs__field`,`customs`.`catid` AS `customs__catid`,`customs`.`content` AS `customs__content` FROM `cn_cms_column` `cms_column` INNER JOIN `cn_cms_column_customs` `customs` ON `cms_column`.`id`=`customs`.`catid` WHERE `parentid` = 7 AND `status` = 1 AND ( FIND_IN_SET(1, isnav) ) ORDER BY `listorder` DESC,`createtime` ASC,`id` ASC [ RunTime:0.000512s ]
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XYZ 晶圆检测平台

产品特性

XY十字叠加结构，内置直线电机，步进/扫描

XY十字叠加结构，内置直线电机，步进/扫描

Z轴采用特别设计，用于光学调焦，重复定位精度±1μm

Z轴采用特别设计，用于光学调焦，重复定位精度±1μm

XY集成高精度光栅尺，重复定位精度±0.5μm

XY集成高精度光栅尺，重复定位精度±0.5μm

底座为采用大理石材料，可以很好的保证下轴高的平面度

底座为采用大理石材料，可以很好的保证下轴高的平面度

典型应用领域：8寸/12寸晶圆检测

典型应用领域：8寸/12寸晶圆检测

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